Tris(ethylmethylamido)(tert-butylimido)tantalum(V) is a chemical compound used as a precursor in chemical vapor deposition processes.
197922-00-8
TAIMATA;Tris(N-ethyl-N-methylamido)-(tert-butylimido)tantalum
C13H34N4Ta
Flammable
Semiconductor Materials , Inorganic Intermediate , Specialty Chemicals , Electronics
430.3
Semiconductor Materials , Inorganic Intermediate , Semiconductor Materials , Specialty Chemicals , Electronics