Tantalum ethoxide is a metal alkoxide used as a precursor in the production of tantalum oxide thin films.
6074-84-6
Tantalum pentaethoxide;Tantalum(V) ethoxide
C10H25O5Ta
Flammable
Semiconductor Materials , Electron Chemicals , Inorganic Intermediate , Specialty Chemicals , Electronics
colorless to pale yellow liquid
249
1.78
101
11
406.17
ether-like
Semiconductor Materials , Electron Chemicals , Semiconductor Materials , Inorganic Intermediate , Specialty Chemicals , Electronics